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Journal of Korean Institute of Fire Science and Engineering 2000;14(4):23-28.
Published online December 31, 2000.
반도체 공장의 제연설계
김운형, Michael J. Ferreira, 안병국
1경민대학 소방안전관리과
2Hughes Associates, Inc., USA
3한국 E&C
A Smoke Management System Design For Semiconductor Fabrication Facilities
김운형 , Michael J. Ferreira , 안병국
1Kyung-Min University Fire Safety Management Department
2Hughes Associates, Inc., USA
3Korea E & C
반도체 공장의 제연설계를 위한 성능기준 설계를 분석하였다. 사례분석을 통하여 제연 설계 시스템의 성능평가 기준을 설정하고 최적의 배연 방법을 분석하기 위한 FDS 화재모델링을 수행하였다. 제연 설계 지침이나 관련 법규 또는 표준화된 기준이 부족한 한국과 미국의 현실에서 본 연구의 성능기준 설계 방법은 반도체공장의 제연 설계를 위한 현실적인 적용과 활용이 기대된다.
A performance-based design of smoke management systems for semiconductor fabrication facilities is described in this paper. The example of one such facility is discussed. Performance criteria for smoke control systems were established, effective smoke removal system features were identified and optimal system exhaust capacity requirements were developed by applying engineering tools including Fire Dynamic Simulator model. Considering the fact that the absence of relevant design guide, codes for consensus standards for semiconductor smoke design in Korea and United States this performance based approach can and should be applied to other fabrication facilities designs.
Key Words: Semiconductor Smoke Management, Fire Dynamic Simulator model
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